Browsing by Author Brinkevich, S.
Showing results 1 to 4 of 4
Issue Date | Title | Author(s) |
2020 | Adhesion of Diazoquinone–Novolac Photoresist Films Implanted with Boron and Phosphorus Ions to Single-Crystal Silicon | Vabishchevich, S.; Brinkevich, S.; Brinkevich, D.; Prosolovich, V. |
2024 | Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon | Vabishchevich, S.; Vabishchevich, N.; Brinkevich, S.; Brinkevich, D.; Prosolovich, V.; Lastovskii, S. |
2020 | Effect of Ion Implantation on the Adhesion of Positive Diazoquinone-Novolak Photoresist Films to Single-Crystal Silicon | Vabishchevich, S.; Brinkevich, S.; Prosolovich, V.; Vabishchevich, N.; Brinkevich, D. |
2021 | Адгезия облученных пленок диазохинонноволачного фоторезиста к монокристаллическому кремнию | Вабищевич, С. А.; Бринкевич, С. Д.; Вабищевич, Н. В.; Бринкевич, Д. И.; Просолович, В. С.; Vabishchevich, S.; Brinkevich, S.; Vabishchevich, N.; Brinkevich, D.; Prosolovich, V. |