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| July 2025 | August 2025 | September 2025 | October 2025 | November 2025 | December 2025 | January 2026 | |
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| Создание субмикронных структур интегральных микросхем с многоуровневой металлизацией | 0 | 1 | 0 | 5 | 10 | 22 | 6 |
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