Please use this identifier to cite or link to this item: https://elib.psu.by/handle/123456789/37022
Title: Microindentation and mechanical properties of silicon
Authors: Vabishchevich, H.
Vabishchevich, S.
Issue Date: 2017
Publisher: Полоцкий государственный университет
Citation: Vabishchevich, H. Microindentation and mechanical properties of silicon / H. Vabishchevich, S. Vabishchevich // European and National Dimension in Research = Европейский и национальный контексты в научных исследованиях : electronic collected materials of IX Junior Researchers' Conference, Novopolotsk, April 26-27, 2017 : in 3 parts / Ministry of Education of Belarus, Polotsk State University ; ed. Dr. Dzmitry Lazouski [et al.]. - Novopolotsk : PSU, 2017. - Part 3 : Technology. - P. 243-246.
Abstract: The paper presents results of the research concerning microindentation of physical and mechanical properties of materials, which are used in modern production technology of electronic devices. On the basis of measurements, the analysis of microhardness, micro-fragility and fracture toughness of silicon, grown according to the Czochralski method (Cz-Si), was carried out, when the combined magnetic fields were applied to the melt.
URI: https://elib.psu.by/handle/123456789/37022
Appears in Collections:European and National Dimension in Research. Technology. 2017

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