Please use this identifier to cite or link to this item:
https://elib.psu.by/handle/123456789/49749Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Prosolovich, V. | - |
| dc.contributor.author | Brinkevich, D. | - |
| dc.contributor.author | Grinyuk, E. | - |
| dc.contributor.author | Yankovskii, Yu. | - |
| dc.contributor.author | Zubova, O. | - |
| dc.contributor.author | Brinkevich, S. | - |
| dc.contributor.author | Vabishchevich, S. | - |
| dc.date.accessioned | 2026-03-27T08:34:37Z | - |
| dc.date.available | 2026-03-27T08:34:37Z | - |
| dc.date.issued | 2026 | - |
| dc.identifier.citation | Prosolovich, V.S., Brinkevich, D.I., Grinyuk, E.V. et al. Stabilizing Treatment of Negative Photoresist Films of the AZ nLOF20XX Series on Silicon. Russ Microelectron 54, 589–594 (2025). https://doi.org/10.1134/S106373972560089X | ru_RU |
| dc.identifier.uri | https://elib.psu.by/handle/123456789/49749 | - |
| dc.language.iso | en | ru_RU |
| dc.publisher | Springer Nature | ru_RU |
| dc.title | Stabilizing Treatment of Negative Photoresist Films of the AZ nLOF20XX Series on Silicon | ru_RU |
| dc.type | Article | ru_RU |
| dc.identifier.doi | 10.1134/S106373972560089X | - |
| Appears in Collections: | Публикации в Scopus и Web of Science | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 589–594.pdf | 168.83 kB | Adobe PDF | View/Open |
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