Please use this identifier to cite or link to this item:
https://elib.psu.by/handle/123456789/49749| Title: | Stabilizing Treatment of Negative Photoresist Films of the AZ nLOF20XX Series on Silicon |
| Authors: | Prosolovich, V. Brinkevich, D. Grinyuk, E. Yankovskii, Yu. Zubova, O. Brinkevich, S. Vabishchevich, S. |
| Issue Date: | 2026 |
| Publisher: | Springer Nature |
| Citation: | Prosolovich, V.S., Brinkevich, D.I., Grinyuk, E.V. et al. Stabilizing Treatment of Negative Photoresist Films of the AZ nLOF20XX Series on Silicon. Russ Microelectron 54, 589–594 (2025). https://doi.org/10.1134/S106373972560089X |
| URI: | https://elib.psu.by/handle/123456789/49749 |
| metadata.dc.identifier.doi: | 10.1134/S106373972560089X |
| Appears in Collections: | Публикации в Scopus и Web of Science |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 589–594.pdf | 168.83 kB | Adobe PDF | View/Open |
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